WEKO3
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パルス光伝導法による22nm世代以降に向けたゲート絶縁膜インライン評価手法の提案
http://hdl.handle.net/2298/00044014
http://hdl.handle.net/2298/000440145f5c6ab9-0f92-4238-9095-36c0a3234bb0
名前 / ファイル | ライセンス | アクション |
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KKC0042_42-29 (155.2 kB)
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Item type | 紀要論文 / Departmental Bulletin Paper(1) | |||||
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公開日 | 2021-09-28 | |||||
タイトル | ||||||
タイトル | パルス光伝導法による22nm世代以降に向けたゲート絶縁膜インライン評価手法の提案 | |||||
言語 | ||||||
言語 | jpn | |||||
資源タイプ | ||||||
資源タイプ | departmental bulletin paper | |||||
著者 |
久保田, 弘
× 久保田, 弘× 松村, 康志× 木村, 慶祐× 吉岡 , 昌雄× 平野, 利政× 濱口, 誠治× 岩田, 洋輔× 那須, 淳一× 塩津, 啓介× 宗, 勇樹× 西, 優弥 |
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書誌情報 |
工学研究機器センター報告 巻 42, p. 29-29, 発行年 2010 |
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ISSN | ||||||
収録物識別子 | 0289694X | |||||
NCID | ||||||
収録物識別子 | AA11333838 | |||||
著者版フラグ | ||||||
出版タイプ | VoR | |||||
日本十進分類法 | ||||||
主題 | 507 | |||||
タイトル(ヨミ) | ||||||
その他のタイトル | パルスコウ デンドウホウ ニヨル 22nm セダイ イコウ ニ ムケタ ゲート ゼツエンマク インライン ヒョウカ シュホウ ノ テイアン | |||||
出版者 | ||||||
出版者 | 熊本大学工学部附属工学研究機器センター |