@article{weko_32747_1, author = "久保田 ,弘 and 中田,明良 and 赤道,孝之 and 小坂 ,光二", title = "Arbitrary pattern fabrication with a LCD reticle-free exposure method", journal = "工学研究機器センター報告", year = "2003", volume = "36", number = "", pages = "20--20" }