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大口径化に対応したSiC基板の紫外光支援研磨に関する研究
http://hdl.handle.net/2298/28869
http://hdl.handle.net/2298/2886984f9f309-e737-4d61-98c0-4fc920de7c78
名前 / ファイル | ライセンス | アクション |
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SGK0025_023-024.pdf (923.4 kB)
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Item type | 会議発表用資料 / Presentation(1) | |||||
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公開日 | 2013-10-03 | |||||
タイトル | ||||||
タイトル | 大口径化に対応したSiC基板の紫外光支援研磨に関する研究 | |||||
言語 | ||||||
言語 | jpn | |||||
キーワード | ||||||
主題 | SiC, ultraprecission machining, ultraviolet-ray irradiation, XPS | |||||
資源タイプ | ||||||
資源タイプ | conference object | |||||
著者 |
坂本, 武司
× 坂本, 武司× 稲木, 匠× 小田, 和明× 峠, 睦 |
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別言語の著者 |
Sakamoto, Takeshi
× Sakamoto, Takeshi× Inaki, Takumi× Oda, Kazuaki× 峠, 睦 |
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内容記述 | ||||||
内容記述 | 平成25年度熊本大学総合技術研究会 | |||||
書誌情報 |
熊本大学総合技術研究会発表要旨 巻 2013, p. 23-24, 発行日 2013-09-20 |
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フォーマット | ||||||
内容記述 | application/pdf | |||||
形態 | ||||||
923412 bytes | ||||||
著者版フラグ | ||||||
出版タイプ | VoR | |||||
日本十進分類法 | ||||||
主題 | 507 | |||||
その他の言語のタイトル | ||||||
その他のタイトル | Study on ultraviolet-ray assisted polishing of SiC sub strate corresponding to large-diameter | |||||
タイトル(ヨミ) | ||||||
その他のタイトル | ダイコウケイ カ ニ タイオウ シタ SiC キバン ノ シガイコウ シエン ケンマ ニ カンスル ケンキュウ | |||||
出版者 | ||||||
出版者 | 熊本大学 | |||||
資源タイプ | ||||||
内容記述 | 発表資料 | |||||
資源タイプ・ローカル | ||||||
発表資料 | ||||||
資源タイプ・NII | ||||||
Presentation | ||||||
資源タイプ・DCMI | ||||||
text | ||||||
資源タイプ・ローカル表示コード | ||||||
05 | ||||||
URI | ||||||
http://hdl.handle.net/2298/28869 |