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Single crystalline SnO2 thin films grown on m-plane sapphire substrate by mist chemical vapor deposition
http://hdl.handle.net/2298/00043685
http://hdl.handle.net/2298/0004368526a482ce-5374-41ce-a2f5-74dd148ed7e5
名前 / ファイル | ライセンス | アクション |
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pss(c)_14_1600148 (556.8 kB)
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Item type | 学術雑誌論文 / Journal Article(1) | |||||
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公開日 | 2021-02-22 | |||||
タイトル | ||||||
言語 | en | |||||
タイトル | Single crystalline SnO2 thin films grown on m-plane sapphire substrate by mist chemical vapor deposition | |||||
言語 | ||||||
言語 | eng | |||||
キーワード | ||||||
主題 | SnO2, m-plane sapphire substrate, mist-CVD, single crystal | |||||
資源タイプ | ||||||
資源タイプ | journal article | |||||
著者 |
谷田部, 然治
× 谷田部, 然治× Tuda, Takaaki× Matsushita, Junya× Sato, Takehide× Otabe, Tatsuya× Sue, Koji× Nagaoka, Shoji× Nakamura, Yusui |
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内容記述 | ||||||
内容記述 | Tin dioxide (SnO2) thin films, as a candidate for realizing next‐generation electrical and optical devices, were grown on 2‐inch diameter m ‐plane sapphire substrates by mist chemical vapour deposition at atmospheric pressure. The SnO2 thin films were characterized by scanning electron microscope (SEM), atomic force microscope (AFM), X‐ray diffraction (XRD) in θ–2θ and φ scanning modes, and electron backscatter diffraction (EBSD). Although the SEM and AFM images showed a relatively rough surface morphology, it was found from the XRD and EBSD measurements that SnO2 films were epitaxially grown on the substrates under optimised growth condition. Epitaxial growth of SnO2 thin film growth at three typical areas on the substrate was confirmed by the EBSD measurements. It is likely that the single crystalline SnO2 (001) thin film was formed across the 2‐inch sapphire substrate. Finally, the second SnO2 layer was overgrown on the above single crystalline SnO2 thin film, which functioned as a buffer layer. This method which drastically improved surface roughness of the second SnO2 layer. | |||||
書誌情報 |
physica status solidi (c) Current topics in solid state physics en : physica status solidi (c) Current topics in solid state physics 巻 14, 号 1-2, p. 1600148, 発行年 2016-11-14 |
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DOI | ||||||
関連タイプ | isVersionOf | |||||
関連識別子 | https://doi.org/10.1002/pssc.201600148 | |||||
権利 | ||||||
権利情報 | (C) 2016 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim | |||||
著者版フラグ | ||||||
出版タイプ | AM | |||||
日本十進分類法 | ||||||
主題 | 501 | |||||
出版者 | ||||||
言語 | en | |||||
出版者 | John Wiley and Sons |