| Item type |
学術雑誌論文 / Journal Article(1) |
| 公開日 |
2023-09-19 |
| タイトル |
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|
タイトル |
Microstructuring glass surfaces using a combined masking and microslurry-jet machining process |
|
言語 |
en |
| 言語 |
|
|
言語 |
eng |
| キーワード |
|
|
主題 |
Micromachining, Microslurry-jet, Photolithography, Glass, Mechanical removal process |
| 資源タイプ |
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|
資源タイプ識別子 |
http://purl.org/coar/resource_type/c_6501 |
|
資源タイプ |
journal article |
| 著者 |
Yoshitaka, Nakanishi
Yuta, Nakashima
Emile, van der Heide
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| 内容記述 |
|
|
内容記述タイプ |
Abstract |
|
内容記述 |
The combined application of a conventional photoresist masking process and microslurry-jet (MSJ) mechanical removal process was studied for microstructuring the surface of glass. Masking patterns made of a photocurable resin (SU-8) were created on the glass, and both the SU-8 patterns and exposed glass surface were simultaneously removed using the MSJ. When the sacrificial patterns of the SU-8 were removed by the MSJ, the glass surface with microstructures was created. Post-treatment, such as removal of the SU-8 patterns, was not required. Confocal microscopy results confirmed that continuously curved convex structures up to 30 μm in diameter and 4 μm in height with highly transparent glass surfaces were created. The microstructures reduced the hydrophilicity of the glass surfaces. Future studies on identifying materials compatible with glass for making masking patterns and showing good wear resistance might prove the feasibility of this method in producing structured engineering surfaces. |
| 書誌情報 |
en : Precision Engineering
巻 67,
p. 172-177,
発行年 2021-01-01
|
| ISSN |
|
|
収録物識別子 |
0141-6359 |
| DOI |
|
|
関連タイプ |
isVersionOf |
|
|
関連識別子 |
https://doi.org/10.1016/j.precisioneng.2020.09.018 |
| 権利 |
|
|
権利情報 |
(C) 2020 Elsevier Inc. All rights reserved. This manuscript version is made available under the CC-BY-NC-ND 4.0 license https://creativecommons.org/licenses/by-nc-nd/4.0/ |
| 著者版フラグ |
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|
出版タイプ |
AM |
|
出版タイプResource |
http://purl.org/coar/version/c_ab4af688f83e57aa |
| 出版者 |
|
|
出版者 |
Elsevier |
j_precisioneng_202009018.pdf (1 MB)
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