| Item type |
会議発表論文 / Conference Paper(1) |
| 公開日 |
2008-12-26 |
| タイトル |
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|
タイトル |
High Repetition Rate Pulsed Power Generator for Extreme Ultraviolet Light Source |
|
言語 |
en |
| 言語 |
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|
言語 |
eng |
| 資源タイプ |
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|
資源タイプ識別子 |
http://purl.org/coar/resource_type/c_5794 |
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資源タイプ |
conference paper |
| 著者 |
佐久川, 貴志
長野, 清彦
近藤, 義泰
浪平, 隆男
勝木, 淳
秋山, 秀典
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| 内容記述 |
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|
内容記述 |
Recently, all solid-state pulsed power generators, which are operated with high repetition rate, long lifetime and high reliability, have been developed for industrial applications, such as high repetition rate pulsed gas lasers, discharges plasma in water and high energy density plasma for extreme ultraviolet (EUV) light sources. We have studied and developed a new high repetition rate all solid-state pulsed power generator for microlithography to discharge produced plasma (DPP) EUV light source. The developed generator consists of a charger a capacitor bank, a semiconductor switch (IGBT), a pulse transformer and a multi-stage magnetic pulse compression circuit. This system can generate an output peak voltage of 30 kV with voltage rise time of about 85 ns, pulse repetition rate is over 10 kiro pulses per second (kpps) in burst operation. In this work, high repetition rate discharge plasmas were produced by the developed system and this discharge plasma used to EUV light source with simple circuit. |
| 書誌情報 |
en : Digest of Technical Papers-IEEE International Pulsed Power Conference
巻 2007,
p. 702-705,
発行日 2007-06
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| DOI |
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関連タイプ |
isIdenticalTo |
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関連識別子 |
https://doi.org/10.1109/PPPS.2007.4345795 |
| 権利 |
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|
言語 |
en |
|
権利情報 |
(C) 2007 IEEE. Personal use of this material is permitted. However, permission to reprint/republish this material for advertising or promotional purposes or for creating new collective works for resale or redistribution to servers or lists, or to reuse any copyrighted component of this work in other works must be obtained from the IEEE. |
| 著者版フラグ |
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出版タイプ |
VoR |
|
出版タイプResource |
http://purl.org/coar/version/c_970fb48d4fbd8a85 |
| 日本十進分類法 |
|
|
主題Scheme |
NDC |
|
主題 |
500 |
| 出版者 |
|
|
出版者 |
Institute of Electrical and Electronics Engineers |
|
言語 |
en |
| コメント |
|
|
言語 |
en |
|
値 |
16th IEEE International Pulsed Power Conference, Albuquerque, New Mexico, June 17-22, 2007 |
2007_159_702-705.pdf (935.0 kB)
