@article{oai:kumadai.repo.nii.ac.jp:00024306,
 author = {木村, 誠一 and Kimura, Seiichi and 吉川, 浩行 and Yoshikawa, Hiroyuki and Munekata, Mizue and 宗像, 瑞恵 and Kurishima, Hiroaki and 山本, 壮平 and Yamamoto, Sohei and 大庭, 英樹 and Ohba, Hideki and 木村, 誠一 and Kimura, Seiichi and 吉川, 浩行 and Yoshikawa, Hiroyuki and Munekata, Mizue and 宗像, 瑞恵 and 栗島, 啓聡 and 山本, 壮平 and Yamamoto, Sohei and 大庭, 英樹 and Ohba, Hideki},
 issue = {744},
 journal = {日本機械学會論文集. B編},
 month = {Aug},
 note = {application/pdf, 論文(Article), The purpose of this study is to make clear the effect of the spin-up acceleration on the boundary layer over the rotating wafer surface. In this paper, onset and breakdown of transient vortices are investigated because transient vortices interfere with the formation of uniform thin film. The air flow fields on the wafer surface are measured by a hot wire anemometer. The onset of transient vortices over the rotating wafer is detected by the spectra of the tangential fluctuating velocity. It is found that transient vortices appear at higher Reynolds number in the case of higher spin-up acceleration of the wafer. On the other hand, transient vortices break down at a certain Reynolds number and the transition of the boundary layer to the turbulent state is independent of the spin up acceleration., http://ci.nii.ac.jp/naid/110006873936},
 pages = {1735--1740},
 title = {回転加速度がウェーハ上の遷移渦の初生に与える影響(流体工学,流体機械)},
 volume = {74},
 year = {2008},
 yomi = {キムラ, セイイチ and ヨシカワ, ヒロユキ and ムネカタ, ミズエ and ヤマモト, ソウヘイ and オオバ, ヒデキ and キムラ, セイイチ and ヨシカワ, ヒロユキ and ムネカタ, ミズエ and ヤマモト, ソウヘイ and オオバ, ヒデキ}
}