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Development of thickness measurement program for transparent conducting oxide thin films
http://hdl.handle.net/2298/19818
http://hdl.handle.net/2298/198186400e95c-3472-42ae-ad42-a0e2f45d50bb
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TSF_518_22_6330-6333_figures.pdf (112.9 kB)
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TSF_518_22_6330-6333.pdf (120.6 kB)
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| Item type | 学術雑誌論文 / Journal Article(1) | |||||
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| 公開日 | 2011-06-24 | |||||
| タイトル | ||||||
| タイトル | Development of thickness measurement program for transparent conducting oxide thin films | |||||
| 言語 | ||||||
| 言語 | eng | |||||
| キーワード | ||||||
| 主題 | Transparent conducting oxide, Gallium doped zinc oxide, Pulsed laser deposition, Film thickness, Drude's theory, Hall effect measurement | |||||
| 資源タイプ | ||||||
| 資源タイプ | journal article | |||||
| 著者 |
Mitsugi, Fumiaki
× Mitsugi, Fumiaki× Matsuoka, Aya× Umeda, Yoshihiro× Ikegami, Tomoaki |
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| 別言語の著者 |
光木, 文秋
× 光木, 文秋× 松岡, 綾× 梅田, 佳宏× 池上, 知顯 |
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| 内容記述 | ||||||
| 内容記述 | The gallium doped zinc oxide has been one of the candidates for the transparent conducting oxide thin film electrode. It is not suitable to use a conventional light interference method to measure the thickness of the gallium doped zinc oxide thin film because the refractive index and extinction coefficient of the thin film is unknown during the optimization of the deposition conditions. In this paper, we report on the details of the film thickness program which uses the measured optical and electric properties and relationship between the plasma frequency and the optical constant of the film. The obtained film thickness of the prepared gallium doped zinc oxide thin film using the program was comparable with thicknesses measured by a cross-sectional analysis of the atomic force microscopy and the surface profiler. Moreover, the optical constant of refractive index and extinction coefficient of the film could also be estimated. | |||||
| 書誌情報 |
Thin Solid Films 巻 518, 号 22, p. 6330-6333, 発行年 2010-09-01 |
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| DOI | ||||||
| 関連タイプ | isVersionOf | |||||
| 関連識別子 | 10.1016/j.tsf.2010.03.047 | |||||
| 権利 | ||||||
| 権利情報 | © 2010 Elsevier B.V. | |||||
| 情報源(ISSN) | ||||||
| 関連名称 | 00406090 | |||||
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| 内容記述タイプ | Other | |||||
| 内容記述 | application/pdf | |||||
| フォーマット | ||||||
| 内容記述タイプ | Other | |||||
| 内容記述 | application/pdf | |||||
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| 120589 bytes | ||||||
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| 112909 bytes | ||||||
| 著者版フラグ | ||||||
| 出版タイプ | AM | |||||
| 日本十進分類法 | ||||||
| 主題Scheme | NDC | |||||
| 主題 | 541 | |||||
| 出版者 | ||||||
| 出版者 | Elsevier B.V. | |||||
| 資源タイプ | ||||||
| 内容記述タイプ | Other | |||||
| 内容記述 | 論文(Article) | |||||
| 資源タイプ・ローカル | ||||||
| 雑誌掲載論文 | ||||||
| 資源タイプ・NII | ||||||
| Journal Article | ||||||
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| 資源タイプ・ローカル表示コード | ||||||
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| URL | ||||||
| 内容記述タイプ | Other | |||||
| 内容記述 | http://www.sciencedirect.com/science/article/pii/S0040609010003470 | |||||
