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Uniformity of gallium doped zinc oxide thin film prepared by pulsed laser deposition
http://hdl.handle.net/2298/19898
http://hdl.handle.net/2298/1989805d39bca-fb3e-438c-a9be-0858d98da1a0
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TSF_518_22_6334-6338_figures.pdf (130.2 kB)
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TSF_518_22_6334-6338.pdf (126.4 kB)
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| Item type | 学術雑誌論文 / Journal Article(1) | |||||
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| 公開日 | 2011-06-28 | |||||
| タイトル | ||||||
| タイトル | Uniformity of gallium doped zinc oxide thin film prepared by pulsed laser deposition | |||||
| 言語 | ||||||
| 言語 | eng | |||||
| キーワード | ||||||
| 主題 | Transparent conducting oxide, Amorphous gallium doped zinc oxide, Pulsed laser deposition, Room temperature deposition, Large-area deposition | |||||
| 資源タイプ | ||||||
| 資源タイプ | journal article | |||||
| 著者 |
Mitsugi, Fumiaki
× Mitsugi, Fumiaki× Umeda, Yoshihiro× Sakai, Norihiro× Ikegami, Tomoaki |
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| 別言語の著者 |
光木, 文秋
× 光木, 文秋× 梅田, 佳宏× 坂井, 徳浩× 池上, 知顯 |
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| 内容記述 | ||||||
| 内容記述 | Recently, transparent conducting oxide thin films have attracted attention for the application to transparent conducting electrodes. In this work, we evaluated the uniformity of electrical, optical and structural properties for gallium doped zinc oxide thin films prepared on the 10 × 10 cm2 silica glass substrate by pulsed laser deposition. The resistivity, carrier concentration, mobility, bonding state and atomic composition of the film were uniform along in-plane and depth direction over the 10 × 10 cm2 area of the substrate. The film showed the average transmittance of 81-87%, resistivity of 1.4 × 10- 3 Ω cm, carrier concentration of 9.7 × 1020/cm3 and mobility of 5 cm2/Vs in spite of the amorphous X-ray diffraction pattern. The gradual thickness distribution was found, however, the potential for large-area and low temperature deposition of transparent conducting oxide thin film using pulsed laser deposition method was confirmed. | |||||
| 書誌情報 |
Thin Solid Films 巻 518, 号 22, p. 6334-6338, 発行年 2010-09-01 |
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| DOI | ||||||
| 関連タイプ | isVersionOf | |||||
| 関連識別子 | 10.1016/j.tsf.2010.03.044 | |||||
| 権利 | ||||||
| 権利情報 | © 2010 Elsevier B.V. | |||||
| 情報源(ISSN) | ||||||
| 関連名称 | 00406090 | |||||
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| 内容記述タイプ | Other | |||||
| 内容記述 | application/pdf | |||||
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| 内容記述タイプ | Other | |||||
| 内容記述 | application/pdf | |||||
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| 126382 bytes | ||||||
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| 出版タイプ | AM | |||||
| 日本十進分類法 | ||||||
| 主題Scheme | NDC | |||||
| 主題 | 541 | |||||
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| 出版者 | Elsevier | |||||
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| 内容記述タイプ | Other | |||||
| 内容記述 | 論文(Article) | |||||
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| 会議発表論文 | ||||||
| 資源タイプ・NII | ||||||
| Journal Article | ||||||
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| URL | ||||||
| 内容記述タイプ | Other | |||||
| 内容記述 | http://www.sciencedirect.com/science/article/pii/S0040609010003445 | |||||
