{"created":"2023-06-19T09:12:56.015369+00:00","id":24856,"links":{},"metadata":{"_buckets":{"deposit":"dfc795f8-aeb4-4ed5-bd75-875795b856da"},"_deposit":{"created_by":1,"id":"24856","owners":[1],"pid":{"revision_id":0,"type":"depid","value":"24856"},"status":"published"},"_oai":{"id":"oai:kumadai.repo.nii.ac.jp:00024856","sets":["426:428"]},"author_link":["111980","111979","111977","111976","111978","111984","111985","111986","111975","111982","111981","111983"],"item_16_biblio_info_6":{"attribute_name":"書誌情報","attribute_value_mlt":[{"bibliographicIssueDates":{"bibliographicIssueDate":"2010-09-01","bibliographicIssueDateType":"Issued"},"bibliographicIssueNumber":"22","bibliographicPageEnd":"6338","bibliographicPageStart":"6334","bibliographicVolumeNumber":"518","bibliographic_titles":[{"bibliographic_title":"Thin Solid Films"}]}]},"item_16_creator_3":{"attribute_name":"別言語の著者","attribute_type":"creator","attribute_value_mlt":[{"creatorNames":[{"creatorName":"光木, 文秋"}],"nameIdentifiers":[{"nameIdentifier":"111983","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"梅田, 佳宏"}],"nameIdentifiers":[{"nameIdentifier":"111984","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"坂井, 徳浩"}],"nameIdentifiers":[{"nameIdentifier":"111985","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"池上, 知顯"}],"nameIdentifiers":[{"nameIdentifier":"111986","nameIdentifierScheme":"WEKO"}]}]},"item_16_description_17":{"attribute_name":"フォーマット","attribute_value_mlt":[{"subitem_description":"application/pdf","subitem_description_type":"Other"},{"subitem_description":"application/pdf","subitem_description_type":"Other"}]},"item_16_description_46":{"attribute_name":"資源タイプ","attribute_value_mlt":[{"subitem_description":"論文(Article)","subitem_description_type":"Other"}]},"item_16_description_5":{"attribute_name":"内容記述","attribute_value_mlt":[{"subitem_description":"Recently, transparent conducting oxide thin films have attracted attention for the application to transparent conducting electrodes. In this work, we evaluated the uniformity of electrical, optical and structural properties for gallium doped zinc oxide thin films prepared on the 10 × 10 cm2 silica glass substrate by pulsed laser deposition. The resistivity, carrier concentration, mobility, bonding state and atomic composition of the film were uniform along in-plane and depth direction over the 10 × 10 cm2 area of the substrate. The film showed the average transmittance of 81-87%, resistivity of 1.4 × 10- 3 Ω cm, carrier concentration of 9.7 × 1020/cm3 and mobility of 5 cm2/Vs in spite of the amorphous X-ray diffraction pattern. The gradual thickness distribution was found, however, the potential for large-area and low temperature deposition of transparent conducting oxide thin film using pulsed laser deposition method was confirmed.","subitem_description_type":"Other"}]},"item_16_description_77":{"attribute_name":"URL","attribute_value_mlt":[{"subitem_description":"http://www.sciencedirect.com/science/article/pii/S0040609010003445","subitem_description_type":"Other"}]},"item_16_publisher_36":{"attribute_name":"出版者","attribute_value_mlt":[{"subitem_publisher":"Elsevier"}]},"item_16_relation_11":{"attribute_name":"DOI","attribute_value_mlt":[{"subitem_relation_type":"isVersionOf","subitem_relation_type_id":{"subitem_relation_type_id_text":"10.1016/j.tsf.2010.03.044","subitem_relation_type_select":"DOI"}}]},"item_16_relation_16":{"attribute_name":"情報源(ISSN)","attribute_value_mlt":[{"subitem_relation_name":[{"subitem_relation_name_text":"00406090"}]}]},"item_16_rights_12":{"attribute_name":"権利","attribute_value_mlt":[{"subitem_rights":"© 2010 Elsevier B.V."}]},"item_16_subject_20":{"attribute_name":"日本十進分類法","attribute_value_mlt":[{"subitem_subject":"541","subitem_subject_scheme":"NDC"}]},"item_16_text_18":{"attribute_name":"形態","attribute_value_mlt":[{"subitem_text_value":"126382 bytes"},{"subitem_text_value":"130192 bytes"}]},"item_16_text_47":{"attribute_name":"資源タイプ・ローカル","attribute_value_mlt":[{"subitem_text_value":"会議発表論文"}]},"item_16_text_48":{"attribute_name":"資源タイプ・NII","attribute_value_mlt":[{"subitem_text_value":"Journal Article"}]},"item_16_text_49":{"attribute_name":"資源タイプ・DCMI","attribute_value_mlt":[{"subitem_text_value":"text"}]},"item_16_text_50":{"attribute_name":"資源タイプ・ローカル表示コード","attribute_value_mlt":[{"subitem_text_value":"01"}]},"item_16_version_type_19":{"attribute_name":"著者版フラグ","attribute_value_mlt":[{"subitem_version_resource":"http://purl.org/coar/version/c_ab4af688f83e57aa","subitem_version_type":"AM"}]},"item_creator":{"attribute_name":"著者","attribute_type":"creator","attribute_value_mlt":[{"creatorNames":[{"creatorName":"Mitsugi, Fumiaki"}],"nameIdentifiers":[{"nameIdentifier":"111975","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"Umeda, Yoshihiro"}],"nameIdentifiers":[{"nameIdentifier":"111976","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"Sakai, Norihiro"}],"nameIdentifiers":[{"nameIdentifier":"111977","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"Ikegami, Tomoaki"}],"nameIdentifiers":[{"nameIdentifier":"111978","nameIdentifierScheme":"WEKO"}]}]},"item_files":{"attribute_name":"ファイル情報","attribute_type":"file","attribute_value_mlt":[{"accessrole":"open_date","date":[{"dateType":"Available","dateValue":"2020-03-02"}],"displaytype":"detail","filename":"TSF_518_22_6334-6338_figures.pdf","filesize":[{"value":"130.2 kB"}],"format":"application/pdf","licensetype":"license_note","mimetype":"application/pdf","url":{"label":"TSF_518_22_6334-6338_figures.pdf","url":"https://kumadai.repo.nii.ac.jp/record/24856/files/TSF_518_22_6334-6338_figures.pdf"},"version_id":"603310f5-06e6-4b8c-9b07-a25f2e2032fe"},{"accessrole":"open_date","date":[{"dateType":"Available","dateValue":"2020-03-02"}],"displaytype":"detail","filename":"TSF_518_22_6334-6338.pdf","filesize":[{"value":"126.4 kB"}],"format":"application/pdf","licensetype":"license_note","mimetype":"application/pdf","url":{"label":"TSF_518_22_6334-6338.pdf","url":"https://kumadai.repo.nii.ac.jp/record/24856/files/TSF_518_22_6334-6338.pdf"},"version_id":"9e02278b-446b-428d-931b-dd6aa299a1ae"}]},"item_keyword":{"attribute_name":"キーワード","attribute_value_mlt":[{"subitem_subject":"Transparent conducting oxide","subitem_subject_scheme":"Other"},{"subitem_subject":"Amorphous gallium doped zinc oxide","subitem_subject_scheme":"Other"},{"subitem_subject":"Pulsed laser deposition","subitem_subject_scheme":"Other"},{"subitem_subject":"Room temperature deposition","subitem_subject_scheme":"Other"},{"subitem_subject":"Large-area deposition","subitem_subject_scheme":"Other"}]},"item_language":{"attribute_name":"言語","attribute_value_mlt":[{"subitem_language":"eng"}]},"item_resource_type":{"attribute_name":"資源タイプ","attribute_value_mlt":[{"resourcetype":"journal article","resourceuri":"http://purl.org/coar/resource_type/c_6501"}]},"item_title":"Uniformity of gallium doped zinc oxide thin film prepared by pulsed laser deposition","item_titles":{"attribute_name":"タイトル","attribute_value_mlt":[{"subitem_title":"Uniformity of gallium doped zinc oxide thin film prepared by pulsed laser deposition"}]},"item_type_id":"16","owner":"1","path":["428"],"pubdate":{"attribute_name":"公開日","attribute_value":"2011-06-28"},"publish_date":"2011-06-28","publish_status":"0","recid":"24856","relation_version_is_last":true,"title":["Uniformity of gallium doped zinc oxide thin film prepared by pulsed laser deposition"],"weko_creator_id":"1","weko_shared_id":-1},"updated":"2023-06-19T18:17:54.174507+00:00"}