@article{oai:kumadai.repo.nii.ac.jp:00028505,
 author = {Yamamuro, Takateru and Ito, Takashi and Matsuda, Mikiya and Shida, Kenji and Tsushida, Masayuki and 山室, 賢輝 and 伊東, 孝史 and 松田, 樹也 and 志田, 賢二 and 津志田, 雅之},
 journal = {熊本大学工学部技術部年次報告集},
 month = {Jun},
 note = {application/pdf, 論文(Article), http://www.tech.eng.kumamoto-u.ac.jp/work/nenpou/2013_techreport.pdf},
 pages = {146--147},
 title = {マグネトロンスパッタ装置の試作とその活用},
 volume = {2013},
 year = {2014}
}