{"created":"2023-06-19T09:18:56.703828+00:00","id":32085,"links":{},"metadata":{"_buckets":{"deposit":"82cc04f1-7abb-48ac-992e-b697dc99862b"},"_deposit":{"created_by":12,"id":"32085","owners":[12],"pid":{"revision_id":0,"type":"depid","value":"32085"},"status":"published"},"_oai":{"id":"oai:kumadai.repo.nii.ac.jp:00032085","sets":["426:428"]},"author_link":["165546","165551","165552","165821"],"control_number":"32085","item_16_biblio_info_6":{"attribute_name":"書誌情報","attribute_value_mlt":[{"bibliographicIssueDates":{"bibliographicIssueDate":"2019-08-01","bibliographicIssueDateType":"Issued"},"bibliographicIssueNumber":"8","bibliographicPageEnd":"593","bibliographicPageStart":"590","bibliographicVolumeNumber":"127","bibliographic_titles":[{"bibliographic_title":"Journal of the Ceramic Society of Japan","bibliographic_titleLang":"en"}]}]},"item_16_description_5":{"attribute_name":"内容記述","attribute_value_mlt":[{"subitem_description":"Excellent quality amorphous aluminum oxide (AlOx) thin films have been obtained by atmospheric pressure solution-processed mist chemical vapor deposition (mist-CVD) technique at 400°C using water-free solvent. X-ray fluorescence investigations verified the formation of AlOx film by the mist-CVD. X-ray diffraction, X-ray photoelectron spectroscopy, ellipsometry and X-ray reflectivity analyses revealed that the synthesized amorphous AlOx films have bandgap of 6.5 eV, refractive index of 1.64 and mass density of 2.78 g/cm3. These values are comparable to those reported for high-quality amorphous Al2O3 thin films deposited by atomic layer deposition method.","subitem_description_language":"en","subitem_description_type":"Other"}]},"item_16_publisher_36":{"attribute_name":"出版者","attribute_value_mlt":[{"subitem_publisher":"The Ceramic Society of Japan","subitem_publisher_language":"en"}]},"item_16_relation_11":{"attribute_name":"DOI","attribute_value_mlt":[{"subitem_relation_type":"isIdenticalTo","subitem_relation_type_id":{"subitem_relation_type_id_text":"https://doi.org/10.2109/jcersj2.19017","subitem_relation_type_select":"DOI"}}]},"item_16_relation_32":{"attribute_name":"論文ID（NAID）","attribute_value_mlt":[{"subitem_relation_type":"isIdenticalTo","subitem_relation_type_id":{"subitem_relation_type_id_text":"130007687006","subitem_relation_type_select":"NAID"}}]},"item_16_rights_12":{"attribute_name":"権利","attribute_value_mlt":[{"subitem_rights":"(C) 2019 The Ceramic Society of Japan","subitem_rights_language":"en"}]},"item_16_source_id_7":{"attribute_name":"ISSN","attribute_value_mlt":[{"subitem_source_identifier":"18820743","subitem_source_identifier_type":"PISSN"}]},"item_16_subject_20":{"attribute_name":"日本十進分類法","attribute_value_mlt":[{"subitem_subject":"501","subitem_subject_scheme":"NDC"}]},"item_16_version_type_19":{"attribute_name":"著者版フラグ","attribute_value_mlt":[{"subitem_version_type":"VoR"}]},"item_creator":{"attribute_name":"著者","attribute_type":"creator","attribute_value_mlt":[{"creatorNames":[{"creatorName":"谷田部, 然治","creatorNameLang":"ja"},{"creatorName":"ヤタベ, ゼンジ","creatorNameLang":"ja-Kana"},{"creatorName":"Yatabe, Zenji","creatorNameLang":"en"}],"nameIdentifiers":[{"nameIdentifier":"165546","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"Nishiyama, Koshi","creatorNameLang":"en"}],"nameIdentifiers":[{"nameIdentifier":"165551","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"Tsuda, Takaaki","creatorNameLang":"en"}],"nameIdentifiers":[{"nameIdentifier":"165552","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"中村 , 有水","creatorNameLang":"ja"},{"creatorName":"ナカムラ , ユウスイ","creatorNameLang":"ja-Kana"},{"creatorName":"Nakamura, Yusui","creatorNameLang":"en"}],"nameIdentifiers":[{"nameIdentifier":"165821","nameIdentifierScheme":"WEKO"}]}]},"item_files":{"attribute_name":"ファイル情報","attribute_type":"file","attribute_value_mlt":[{"accessrole":"open_date","date":[{"dateType":"Available","dateValue":"2021-02-18"}],"displaytype":"detail","filename":"127_19017.pdf","filesize":[{"value":"617.7 kB"}],"format":"application/pdf","licensetype":"license_2","mimetype":"application/pdf","url":{"label":"127_19017","url":"https://kumadai.repo.nii.ac.jp/record/32085/files/127_19017.pdf"},"version_id":"d3503483-a1e1-4cf5-9826-243dc051838a"}]},"item_keyword":{"attribute_name":"キーワード","attribute_value_mlt":[{"subitem_subject":"Mist chemical vapor deposition","subitem_subject_language":"en","subitem_subject_scheme":"Other"},{"subitem_subject":"Aluminium oxide","subitem_subject_language":"en","subitem_subject_scheme":"Other"},{"subitem_subject":"Bandgap","subitem_subject_language":"en","subitem_subject_scheme":"Other"}]},"item_language":{"attribute_name":"言語","attribute_value_mlt":[{"subitem_language":"eng"}]},"item_resource_type":{"attribute_name":"資源タイプ","attribute_value_mlt":[{"resourcetype":"journal article","resourceuri":"http://purl.org/coar/resource_type/c_6501"}]},"item_title":"Structural characterization of mist chemical vapor deposited amorphous aluminum oxide films using water-free solvent","item_titles":{"attribute_name":"タイトル","attribute_value_mlt":[{"subitem_title":"Structural characterization of mist chemical vapor deposited amorphous aluminum oxide films using water-free solvent","subitem_title_language":"en"}]},"item_type_id":"16","owner":"12","path":["428"],"pubdate":{"attribute_name":"PubDate","attribute_value":"2021-02-18"},"publish_date":"2021-02-18","publish_status":"0","recid":"32085","relation_version_is_last":true,"title":["Structural characterization of mist chemical vapor deposited amorphous aluminum oxide films using water-free solvent"],"weko_creator_id":"12","weko_shared_id":-1},"updated":"2023-09-07T05:53:55.605445+00:00"}