{"created":"2023-06-19T09:19:17.402347+00:00","id":32580,"links":{},"metadata":{"_buckets":{"deposit":"6e63715f-2d69-40c0-a5e3-bada2e448a62"},"_deposit":{"created_by":15,"id":"32580","owners":[15],"pid":{"revision_id":0,"type":"depid","value":"32580"},"status":"published"},"_oai":{"id":"oai:kumadai.repo.nii.ac.jp:00032580","sets":[]},"author_link":["166238","166031","165831","166237","166234","166235","166236","166239"],"item_15_alternative_title_23":{"attribute_name":"タイトル（ヨミ）","attribute_value_mlt":[{"subitem_alternative_title":"インライン タイオウ レジストマク オンド ケンサ ソウチ ニ カンスル ケンキュウ"}]},"item_15_biblio_info_6":{"attribute_name":"書誌情報","attribute_value_mlt":[{"bibliographicIssueDates":{"bibliographicIssueDate":"2007","bibliographicIssueDateType":"Issued"},"bibliographicPageEnd":"37","bibliographicPageStart":"37","bibliographicVolumeNumber":"39","bibliographic_titles":[{"bibliographic_title":"工学研究機器センター報告"}]}]},"item_15_publisher_36":{"attribute_name":"出版者","attribute_value_mlt":[{"subitem_publisher":"熊本大学工学部附属工学研究機器センター"}]},"item_15_source_id_7":{"attribute_name":"ISSN","attribute_value_mlt":[{"subitem_source_identifier":"0289694X","subitem_source_identifier_type":"ISSN"}]},"item_15_source_id_9":{"attribute_name":"書誌レコードID","attribute_value_mlt":[{"subitem_source_identifier":"AA11333838","subitem_source_identifier_type":"NCID"}]},"item_15_subject_20":{"attribute_name":"日本十進分類法","attribute_value_mlt":[{"subitem_subject":"507","subitem_subject_scheme":"NDC"}]},"item_15_version_type_19":{"attribute_name":"著者版フラグ","attribute_value_mlt":[{"subitem_version_type":"VoR"}]},"item_creator":{"attribute_name":"著者","attribute_type":"creator","attribute_value_mlt":[{"creatorAffiliations":[{"affiliationNameIdentifiers":[{"affiliationNameIdentifier":"","affiliationNameIdentifierScheme":"ISNI","affiliationNameIdentifierURI":"http://www.isni.org/isni/"}],"affiliationNames":[{"affiliationName":"","affiliationNameLang":"ja"}]}],"creatorNames":[{"creatorName":"久保田, 弘","creatorNameLang":"ja"},{"creatorName":"クボタ, ヒロシ","creatorNameLang":"ja-Kana"},{"creatorName":"Kubota, Hiroshi","creatorNameLang":"en"}],"familyNames":[{"familyName":"久保田","familyNameLang":"ja"},{"familyName":"クボタ","familyNameLang":"ja-Kana"},{"familyName":"Kubota","familyNameLang":"en"}],"givenNames":[{"givenName":"弘","givenNameLang":"ja"},{"givenName":"ヒロシ","givenNameLang":"ja-Kana"},{"givenName":"Hiroshi","givenNameLang":"en"}],"nameIdentifiers":[{"nameIdentifier":"165831","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"中田, 明良"},{"creatorName":"ナカダ, アキラ","creatorNameLang":"ja-Kana"}],"nameIdentifiers":[{"nameIdentifier":"166234","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"江口, 雅典"}],"nameIdentifiers":[{"nameIdentifier":"166235","nameIdentifierScheme":"WEKO"}]},{"creatorAffiliations":[{"affiliationNameIdentifiers":[{"affiliationNameIdentifier":"","affiliationNameIdentifierScheme":"ISNI","affiliationNameIdentifierURI":"http://www.isni.org/isni/"}],"affiliationNames":[{"affiliationName":"","affiliationNameLang":"ja"}]}],"creatorNames":[{"creatorName":"齊藤, 茂樹","creatorNameLang":"ja"},{"creatorName":"サイトウ, シゲキ","creatorNameLang":"ja-Kana"},{"creatorName":"Saito, Shigeki","creatorNameLang":"en"}],"familyNames":[{"familyName":"齊藤","familyNameLang":"ja"},{"familyName":"サイトウ","familyNameLang":"ja-Kana"},{"familyName":"Saito","familyNameLang":"en"}],"givenNames":[{"givenName":"茂樹","givenNameLang":"ja"},{"givenName":"シゲキ","givenNameLang":"ja-Kana"},{"givenName":"Shigeki","givenNameLang":"en"}],"nameIdentifiers":[{"nameIdentifier":"166236","nameIdentifierScheme":"WEKO"}]},{"creatorAffiliations":[{"affiliationNameIdentifiers":[{"affiliationNameIdentifier":"","affiliationNameIdentifierScheme":"ISNI","affiliationNameIdentifierURI":"http://www.isni.org/isni/"}],"affiliationNames":[{"affiliationName":"","affiliationNameLang":"ja"}]}],"creatorNames":[{"creatorName":"那須, 淳一","creatorNameLang":"ja"},{"creatorName":"ナス, ジュンイチ","creatorNameLang":"ja-Kana"},{"creatorName":"Nasu, Jyun-ichi","creatorNameLang":"en"}],"familyNames":[{"familyName":"那須","familyNameLang":"ja"},{"familyName":"ナス","familyNameLang":"ja-Kana"},{"familyName":"Nasu","familyNameLang":"en"}],"givenNames":[{"givenName":"淳一","givenNameLang":"ja"},{"givenName":"ジュンイチ","givenNameLang":"ja-Kana"},{"givenName":"Jyun-ichi","givenNameLang":"en"}],"nameIdentifiers":[{"nameIdentifier":"166031","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"羽山, 隆史"},{"creatorName":"ハヤマ, タカフミ","creatorNameLang":"ja-Kana"}],"nameIdentifiers":[{"nameIdentifier":"166237","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"新庄, 信博"},{"creatorName":"シンジョウ, ノブヒロ","creatorNameLang":"ja-Kana"}],"nameIdentifiers":[{"nameIdentifier":"166238","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"日高, 光太"},{"creatorName":"ヒダカ, コウタ","creatorNameLang":"ja-Kana"}],"nameIdentifiers":[{"nameIdentifier":"166239","nameIdentifierScheme":"WEKO"}]}]},"item_files":{"attribute_name":"ファイル情報","attribute_type":"file","attribute_value_mlt":[{"accessrole":"open_date","date":[{"dateType":"Available","dateValue":"2021-10-28"}],"displaytype":"detail","filename":"KKC0039_037_39-37.pdf","filesize":[{"value":"16.2 kB"}],"format":"application/pdf","licensetype":"license_note","mimetype":"application/pdf","url":{"label":"KKC0039_037_39-37","url":"https://kumadai.repo.nii.ac.jp/record/32580/files/KKC0039_037_39-37.pdf"},"version_id":"f70f7e5c-47ad-4ecc-8b33-5ffe23392536"}]},"item_language":{"attribute_name":"言語","attribute_value_mlt":[{"subitem_language":"jpn"}]},"item_resource_type":{"attribute_name":"資源タイプ","attribute_value_mlt":[{"resourcetype":"departmental bulletin paper","resourceuri":"http://purl.org/coar/resource_type/c_6501"}]},"item_title":"インライン対応レジスト膜温度検査装置に関する研究","item_titles":{"attribute_name":"タイトル","attribute_value_mlt":[{"subitem_title":"インライン対応レジスト膜温度検査装置に関する研究"}]},"item_type_id":"15","owner":"15","path":["482","1532"],"pubdate":{"attribute_name":"公開日","attribute_value":"2021-10-28"},"publish_date":"2021-10-28","publish_status":"0","recid":"32580","relation_version_is_last":true,"title":["インライン対応レジスト膜温度検査装置に関する研究"],"weko_creator_id":"15","weko_shared_id":15},"updated":"2023-09-07T02:50:27.663924+00:00"}