@article{oai:kumadai.repo.nii.ac.jp:00032602, author = {安井, 平司 and 山本, 雄記 and Yamamoto, Yuki and 澤, 武一}, journal = {工学研究機器センター報告}, month = {}, pages = {8--8}, title = {Ultra-smoothness Grinding of Silicon Carbide in Depth of Cut of 1mm}, volume = {38}, year = {2006}, yomi = {ヤスイ, ヘイジ and ヤマモト, ユウキ} }