@article{oai:kumadai.repo.nii.ac.jp:00032690, author = {久保田, 弘 and Kubota, Hiroshi and 中田, 明良 and 若杉, 雄彦 and 脇元, 聡}, journal = {工学研究機器センター報告}, month = {}, pages = {19--19}, title = {Design and Fabrication of MOS Device Circuits with Reticle-Free Exposure Method}, volume = {37}, year = {2005}, yomi = {クボタ, ヒロシ and ナカダ, アキラ and ワキモト, サトシ} }