@article{oai:kumadai.repo.nii.ac.jp:00032878,
 author = {久保田, 弘 and 永本, 恵市 and 江頭, 義也 and 柴田, 節 and 小坂, 光二 and Kosaka, Koji and 高田, 真次 and 岩渕, 哲也},
 journal = {工学研究機器センター報告},
 month = {Mar},
 pages = {17--17},
 title = {"Development of an ultra-precision positioner and its applications"},
 volume = {34},
 year = {2002},
 yomi = {クボタ, ヒロシ and エガシラ, ヨシヤ and コサカ, コウジ}
}