@article{oai:kumadai.repo.nii.ac.jp:00033180,
 author = {蛯原, 健治 and 山形, 幸彦 and 池上, 知顯},
 journal = {工学研究機器センター報告},
 month = {Mar},
 pages = {20--20},
 title = {Y-BA-CU-O THICK-FILM PREPARATION USING MULTISTEP KRF EXCIMER-LASER DEPOSITION},
 volume = {30},
 year = {1998},
 yomi = {エビハラ, ケンジ and ヤマガタ, ユキヒコ and イケガミ, トモアキ}
}