@article{oai:kumadai.repo.nii.ac.jp:00034888,
 author = {久保田, 弘 and Kubota, Hiroshi and 江頭, 義也 and 柴田, 節 and 小坂, 光二 and 高田, 真次 and 岩淵, 哲也},
 journal = {工学研究機器センター報告},
 month = {Mar},
 pages = {11--11},
 title = {Development of an ultra-precision positioner and its applications},
 volume = {33},
 year = {2001},
 yomi = {クボタ, ヒロシ and エガシラ, ヨシヤ and コサカ, コウジ}
}