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マグネトロンスパッタ装置の試作とその活用
http://hdl.handle.net/2298/30435
http://hdl.handle.net/2298/30435328b62db-d10d-487f-9c71-b6d09610f391
名前 / ファイル | ライセンス | アクション |
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Item type | 紀要論文 / Departmental Bulletin Paper(1) | |||||
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公開日 | 2014-06-20 | |||||
タイトル | ||||||
タイトル | マグネトロンスパッタ装置の試作とその活用 | |||||
言語 | ||||||
言語 | jpn | |||||
資源タイプ | ||||||
資源タイプ | departmental bulletin paper | |||||
著者 |
山室, 賢輝
× 山室, 賢輝× 伊東, 孝史× 松田, 樹也× 志田, 賢二× 津志田, 雅之 |
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別言語の著者 |
Yamamuro, Takateru
× Yamamuro, Takateru× Ito, Takashi× Matsuda, Mikiya× Shida, Kenji× Tsushida, Masayuki |
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書誌情報 |
熊本大学工学部技術部年次報告集 巻 2013, p. 146-147, 発行年 2014-06-02 |
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NCID | ||||||
収録物識別子 | AA12358619 | |||||
フォーマット | ||||||
内容記述 | application/pdf | |||||
形態 | ||||||
634255 bytes | ||||||
著者版フラグ | ||||||
出版タイプ | VoR | |||||
日本十進分類法 | ||||||
主題 | 507 | |||||
タイトル(ヨミ) | ||||||
その他のタイトル | マグネトロン スパッタ ソウチ ノ シサク ト ソノ カツヨウ | |||||
出版者 | ||||||
出版者 | 熊本大学工学部技術部 | |||||
資源タイプ | ||||||
内容記述 | 論文(Article) | |||||
資源タイプ・ローカル | ||||||
紀要論文 | ||||||
資源タイプ・NII | ||||||
Departmental Bulletin Paper | ||||||
資源タイプ・DCMI | ||||||
text | ||||||
資源タイプ・ローカル表示コード | ||||||
02 | ||||||
URL | ||||||
内容記述 | http://www.tech.eng.kumamoto-u.ac.jp/work/nenpou/2013_techreport.pdf | |||||
コメント | ||||||
第8章 研究成果, 8-7 |