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QTATを実現するレチクルフリー露光技術と超精密検査技術
http://hdl.handle.net/2298/00044239
http://hdl.handle.net/2298/000442392b3a86f9-204e-4cb0-b713-48bdce15058d
名前 / ファイル | ライセンス | アクション |
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KKC0037_013_37-18 (11.6 kB)
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Item type | 紀要論文 / Departmental Bulletin Paper(1) | |||||
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公開日 | 2021-11-18 | |||||
タイトル | ||||||
タイトル | QTATを実現するレチクルフリー露光技術と超精密検査技術 | |||||
言語 | ||||||
言語 | jpn | |||||
資源タイプ | ||||||
資源タイプ | departmental bulletin paper | |||||
著者 |
久保田, 弘
× 久保田, 弘× 中田, 明良× 若杉, 雄彦× 小坂, 光二× 赤道, 孝之× 板倉, 敬二郎× 脇元, 聡 |
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書誌情報 |
工学研究機器センター報告 巻 37, p. 13-13, 発行年 2005 |
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ISSN | ||||||
収録物識別子 | 0289694X | |||||
NCID | ||||||
収録物識別子 | AA11333838 | |||||
著者版フラグ | ||||||
出版タイプ | VoR | |||||
日本十進分類法 | ||||||
主題 | 507 | |||||
タイトル(ヨミ) | ||||||
その他のタイトル | QTAT オ ジツゲン スル レチクルフリー ロコウ ギジュツ ト チョウセイミツ ケンサ ギジュツ | |||||
出版者 | ||||||
出版者 | 熊本大学工学部附属工学研究機器センター |