{"_buckets": {"deposit": "85fd25f0-ab2a-438a-89f1-7f22a15f746c"}, "_deposit": {"created_by": 15, "id": "32718", "owners": [15], "pid": {"revision_id": 0, "type": "depid", "value": "32718"}, "status": "published"}, "_oai": {"id": "oai:kumadai.repo.nii.ac.jp:00032718", "sets": []}, "author_link": ["166578", "166579", "166234", "165831", "166403"], "item_15_alternative_title_23": {"attribute_name": "タイトル（ヨミ）", "attribute_value_mlt": [{"subitem_alternative_title": "サブ 0.1ミクロン カコウ ノ タメ ノ ユウドウ ケツゴウガタ プラズマ トクセイ ノ ヒョウカ"}]}, "item_15_biblio_info_6": {"attribute_name": "書誌情報", "attribute_value_mlt": [{"bibliographicIssueDates": {"bibliographicIssueDate": "2003", "bibliographicIssueDateType": "Issued"}, "bibliographicPageEnd": "9", "bibliographicPageStart": "9", "bibliographicVolumeNumber": "36", "bibliographic_titles": [{"bibliographic_title": "工学研究機器センター報告"}]}]}, "item_15_publisher_36": {"attribute_name": "出版者", "attribute_value_mlt": [{"subitem_publisher": "熊本大学工学部附属工学研究機器センター"}]}, "item_15_source_id_7": {"attribute_name": "ISSN", "attribute_value_mlt": [{"subitem_source_identifier": "0289694X", "subitem_source_identifier_type": "ISSN"}]}, "item_15_source_id_9": {"attribute_name": "書誌レコードID", "attribute_value_mlt": [{"subitem_source_identifier": "AA11333838", "subitem_source_identifier_type": "NCID"}]}, "item_15_subject_20": {"attribute_name": "日本十進分類法", "attribute_value_mlt": [{"subitem_subject": "507", "subitem_subject_scheme": "NDC"}]}, "item_15_version_type_19": {"attribute_name": "著者版フラグ", "attribute_value_mlt": [{"subitem_version_resource": "http://purl.org/coar/version/c_970fb48d4fbd8a85", "subitem_version_type": "VoR"}]}, "item_creator": {"attribute_name": "著者", "attribute_type": "creator", "attribute_value_mlt": [{"creatorAffiliations": [{"affiliationNameIdentifiers": [{"affiliationNameIdentifier": "", "affiliationNameIdentifierScheme": "ISNI", "affiliationNameIdentifierURI": "http://www.isni.org/isni/"}], "affiliationNames": [{"affiliationName": "", "affiliationNameLang": "ja"}]}], "creatorNames": [{"creatorName": "久保田, 弘", "creatorNameLang": "ja"}, {"creatorName": "クボタ, ヒロシ", "creatorNameLang": "ja-Kana"}, {"creatorName": "Kubota, Hiroshi", "creatorNameLang": "en"}], "familyNames": [{"familyName": "久保田", "familyNameLang": "ja"}, {"familyName": "クボタ", "familyNameLang": "ja-Kana"}, {"familyName": "Kubota", "familyNameLang": "en"}], "givenNames": [{"givenName": "弘", "givenNameLang": "ja"}, {"givenName": "ヒロシ", "givenNameLang": "ja-Kana"}, {"givenName": "Hiroshi", "givenNameLang": "en"}], "nameIdentifiers": [{"nameIdentifier": "165831", "nameIdentifierScheme": "WEKO"}]}, {"creatorNames": [{"creatorName": "中田, 明良"}, {"creatorName": "ナカダ, アキラ", "creatorNameLang": "ja-Kana"}], "nameIdentifiers": [{"nameIdentifier": "166234", "nameIdentifierScheme": "WEKO"}]}, {"creatorNames": [{"creatorName": "木原, 健雄"}], "nameIdentifiers": [{"nameIdentifier": "166578", "nameIdentifierScheme": "WEKO"}]}, {"creatorNames": [{"creatorName": "森川, 晃次"}, {"creatorName": "モリカワ, コウジ", "creatorNameLang": "ja-Kana"}], "nameIdentifiers": [{"nameIdentifier": "166403", "nameIdentifierScheme": "WEKO"}]}, {"creatorNames": [{"creatorName": "森, 康雄"}], "nameIdentifiers": [{"nameIdentifier": "166579", "nameIdentifierScheme": "WEKO"}]}]}, "item_files": {"attribute_name": "ファイル情報", "attribute_type": "file", "attribute_value_mlt": [{"accessrole": "open_date", "date": [{"dateType": "Available", "dateValue": "2021-11-30"}], "displaytype": "detail", "download_preview_message": "", "file_order": 0, "filename": "KKC0036_009_36-16.pdf", "filesize": [{"value": "266.0 kB"}], "format": "application/pdf", "future_date_message": "", "is_thumbnail": false, "licensetype": "license_free", "mimetype": "application/pdf", "size": 266000.0, "url": {"label": "KKC0036_009_36-16", "url": "https://kumadai.repo.nii.ac.jp/record/32718/files/KKC0036_009_36-16.pdf"}, "version_id": "681295b2-35ed-4119-93ea-1243c74106ef"}]}, "item_language": {"attribute_name": "言語", "attribute_value_mlt": [{"subitem_language": "jpn"}]}, "item_resource_type": {"attribute_name": "資源タイプ", "attribute_value_mlt": [{"resourcetype": "departmental bulletin paper", "resourceuri": "http://purl.org/coar/resource_type/c_6501"}]}, "item_title": "サブ0.1ミクロン加工のための誘導結合型プラズマ特性の評価", "item_titles": {"attribute_name": "タイトル", "attribute_value_mlt": [{"subitem_title": "サブ0.1ミクロン加工のための誘導結合型プラズマ特性の評価"}]}, "item_type_id": "15", "owner": "15", "path": ["482", "1538"], "permalink_uri": "http://hdl.handle.net/2298/00044274", "pubdate": {"attribute_name": "公開日", "attribute_value": "2021-11-25"}, "publish_date": "2021-11-25", "publish_status": "0", "recid": "32718", "relation": {}, "relation_version_is_last": true, "title": ["サブ0.1ミクロン加工のための誘導結合型プラズマ特性の評価"], "weko_shared_id": 15}